%0 Journal Article
%T Simulation of the Tuning Characteristics of 1.55μm MOEMS Tunable Optical Filters<br>1.55 μm MOEMS可调谐光滤波器调谐性能模拟
%A (State Key Laboratory on Integrated Optoelectroncis
%A Institute of Semiconductors
%A Chinese Academy of Sciences
%A Beijing
%A <br>左玉华
%A 毛容伟
%A 王良臣
%A 余金中
%A 王启明
%J 光子学报
%D 2005
%I 
%X 建立了等效单层梁模型和一维集总模型，用经典力学理论和传输矩阵方法模拟了多层材件构成且具有四臂固支梁结构的1．55μm Si基MOEMS(Micro-Opto-Electro-Mechanical-Systems)可调谐滤波器的调谐特性，模拟调谐系数与实验结果吻合较好。
%K MOEMS
%K Tunable optical filter
%K Fabry-Perot
%K Surface micromaching<br>MOEMS
%K 可调谐滤波器
%K Fabry-Perot
%K 表面微机械
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=057753D3535EE8D1&yid=2DD7160C83D0ACED&vid=339D79302DF62549&iid=E158A972A605785F&sid=20C3B205768D55E0&eid=652E7E360EBE3082&journal_id=1004-4213&journal_name=光子学报&referenced_num=2&reference_num=9