%0 Journal Article
%T STUDY AND MANUFACTURE OF OPTICAL WAVEGUIDES IN BESOI STRUCTURES<br>BESOI光波导的研制
%A Li Guozheng
%A Zhao Cezhou
%A Zheng Yuxiang
%A Liu Enke
%A <br>李国正
%A 赵策洲
%J 光子学报
%D 1996
%I 
%X Through a lot of experiments,using methods of bonding and etching back,the optical waveguides in SOI structures have been fabricated with propagation loss of 0.85dB/cm.
%K Integrated Optics
%K SOI
%K Ootical waveguide<br>集成光学
%K SOI
%K 光波导
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=7A99AE8C04B3C053921E5E7F7B8A3C77&yid=8A15F8B0AA0E5323&vid=C5154311167311FE&iid=38B194292C032A66&sid=10828928EB89AD8E&eid=627456E7977439A4&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=3