%0 Journal Article %T INFLUENCE OF NITROGEN FLOW RATE ON FIELD ELECTRON EMISSON ON AMORPHOUS-CARBON
氮流量对非晶碳膜场致电子发射的影响 %A Wang Xiaoping %A Li Yunjun %A Yao Ning %A Ma Huizhong %A Bi Zhaoqi %A Zhang Binglin %A
王小平 %A 李运钧 %A 姚宁 %A 冯会中 %A 毕兆琪 %A 张兵临 %J 电子与信息学报 %D 2001 %I %X Using microwave plasma-assisted chemical vapor deposition system, the nitrogen dopeed amorphaus-carbon films are obtained on the deposited molybdenum films, which are deposited on ceramic (Al2O3). The scanning electron microscopy (SEM), optical microscopy, X-ray diffraction (XRD) and Raman spectrum are used to analyze the obtained. Experimental results show that, when increasing the nitrogen, the eaission current density increases and the turn-on field decreases. %K Amorphous-carbon thin film %K Field electron emission %K Electron affinity
非晶碳膜 %K 场致电子发射 %K 电子亲和势 %K 氮流量 %K 平板显示 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=FF502F7090CAC008&yid=14E7EF987E4155E6&vid=EA389574707BDED3&iid=B31275AF3241DB2D&sid=6837BC93241057EF&eid=23F919F7BAF87909&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=0&reference_num=5