%0 Journal Article
%T RESEARCH ON "CATHODE-ON-MEMBRANE" VACUUM MICROELECTRONIC PRESSURE SENSOR<br>阴极-敏感膜复合型真空微电子压力传感器研究
%A Tao Xinxin
%A Xia Shanhong
%A Su Jie
%A Chen Shaofeng
%A <br>陶新昕
%A 夏善红
%A 苏杰
%A 陈绍凤
%J 电子与信息学报
%D 2001
%I 
%X This paper proposes a novel "cathode-on-membrane" vacuum microelectronic pressure sensor. The "cathode-on-membrane" structure has been fabricated. The properties of the silicon membrane under pressure are simulated, and the effects of the parameters of membrame structure on the sensitivity are discussed.
%K Vacuum microelectronic
%K Pressure sensor<br>真空微电子
%K 压力传感器
%K 阴极－敏感膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=0BFB79135C01517A&yid=14E7EF987E4155E6&vid=EA389574707BDED3&iid=CA4FD0336C81A37A&sid=35FC3610259C2B32&eid=656F8C8401D91023&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=2&reference_num=4