%0 Journal Article
%T UV SURFACE CLEANING METHOD FOR REMOVING HYDROCARBONS FROM GaAs SURFACE<br>用紫外光表面处理方法清除砷化镓表面的碳氢化合物
%A Tan Kaisheng
%A Li Jianping
%A <br>谈凯声
%A 李建平
%J 电子与信息学报
%D 1986
%I 
%X A simple but high-efficient UV surf ace cleaning method for removing absorbed hydrocarbons from GaAs surface is described. The analytic results of Auger spectra show that the method is very effective.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=7414BB8CD7E01ADB&yid=4E65715CCF57055A&vid=5D311CA918CA9A03&iid=0B39A22176CE99FB&sid=7CE3F1F20DE6B307&eid=0B4F496D54044D86&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=0&reference_num=7