%0 Journal Article
%T A NEW TECHNIQUE FOR THINNING THE THICKNESS OF UNUNIFORM EPILAYERS--SELECTIVE ANODIC OXIDATION<br>一种新的非均匀减薄法——选择阳极氧化法
%A Gao Fengseng
%A Gong Xiuying
%A Ge Yongcai
%A <br>高凤升
%A 龚秀英
%A 葛永才
%J 电子与信息学报
%D 1991
%I 
%X A new technique called selective anodic oxidation, by which the ununiform epilayers can be thinned, is presented. The thickness of n+-layers of GaAs IMPATT diodes with n+-n-n++ structure has been strictly controlled by the use of this technique. This results in the efficiency of IMPATT diodes up to its theoretical value.
%K Semiconductor technology
%K Thinning technique
%K Selective anodic xidation<br>半导体工艺
%K 减薄技术
%K 选择阳极氧化
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=B70CB8CBA9B6CCD4&yid=116CB34717B0B183&vid=FC0714F8D2EB605D&iid=0B39A22176CE99FB&sid=78F0EFE028BD3783&eid=A1266CF37D675CF1&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=0&reference_num=1