%0 Journal Article
%T AUTO REFERENCE GRATING METHOD OF 3 D SURFACE MEASUREMENT<br>三维形貌检测的自动参考栅象法研究
%A Xu Jianqiang
%A Wang Yunshan
%A <br>徐建强
%J 光子学报
%D 1998
%I 
%X A new method of producing reference grating automatically and error correcting used in Fourier transform profilometry is proposed and verified by experiments.It is proved that the method has very good effect.Thereby this method improves the accuracy and practicality of Fourier transform profilometry greatly.
%K Fourier transform profilometry
%K 3
%K D surface measurement
%K Reference grating<br>傅里叶变换
%K 三维
%K 形貌测量
%K 栅象法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=09522F153CED69C142073D6D1A519BB4&yid=8CAA3A429E3EA654&vid=DB817633AA4F79B9&iid=B31275AF3241DB2D&sid=4AB4178709047BE3&eid=2E15A588990CC690&journal_id=1004-4213&journal_name=光子学报&referenced_num=4&reference_num=1