%0 Journal Article
%T Evolution of infrared spectra and optical emission spectra in hydrogenated silicon thin films prepared by VHF-PECVD<br>
%A Hou Guo-Fu
%A Geng Xin-Hu
%A Zhang Xiao-Dan
%A Sun Jian
%A Zhang Jian-Jun
%A Zhao Ying
%A <br>
%J 中国物理 B
%D 2011
%I 
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=DEF413115F4CED2BF49C9A9D4EECEC5E&yid=9377ED8094509821&vid=A04140E723CB732E&iid=DF92D298D3FF1E6E&sid=4B008B949E75104C&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=25