%0 Journal Article
%T High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre<br>
%A Zhu Yu
%A Xu Xue-Jun
%A Li Zhi-Yong
%A Zhou Liang
%A Han Wei-Hu
%A Fan Zhong-Chao
%A Yu Yu-De
%A Yu Jin-Zhong
%A <br>
%J 中国物理 B
%D 2010
%I 
%X A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46{\%} and 25{\%} at a wavelength of 1.55~$\mu $m are achieved by simulation and experiment, respectively. An optical 3~dB bandwidth of 45~nm from 1530~nm to 1575~nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10~nm in etch depth is achievable. The measurement results indicate that the alignment error of $\pm $2~$\mu $m results in less than 1~dB additional coupling loss.
%K grating coupler
%K silicon-on-insulator
%K coupling efficiency
%K bandwidth<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=01F86B9A4BD444575CDB0A42BAC1C6E0&yid=140ECF96957D60B2&vid=2A8D03AD8076A2E3&iid=CA4FD0336C81A37A&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=15