%0 Journal Article %T Influence of Boron doping on microcrystalline silicon growth
%A Li Xin-Li %A Chen Yong-Sheng %A Yang Shi-E %A Gu Jin-Hu %A Lu Jing-Xiao %A Gao Xiao-Yong %A Li Rui %A Jiao Yue-Chao %A Gao Hai-Bo %A Wang Guo %A
%J 中国物理 B %D 2011 %I %K microcrystalline silicon thin film %K surface roughness %K shadowing effect
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=49438F68A18A452482BB1CD273310A20&yid=9377ED8094509821&vid=A04140E723CB732E&iid=9CF7A0430CBB2DFD&sid=0D4126589EECFFEC&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=29