%0 Journal Article %T A novel implantable multichannel silicon-based microelectrode %A Sui Xiao-Hong %A Zhang Ruo-Xin %A Pei Wei-Hua %A Chen Hong-Da %A
隋晓红 %A 张若昕 %A 裴为华 %A 陈弘达 %J 中国物理 B %D 2007 %I %X Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. The fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. The manufacturing process by micro-electromechanical system (MEMS) technology was detailed with four photolithographic masks. The microscopic photographs and SEM images indicated that the probe shank was 3mm long, 100\mum wide and 20\mu m thick with the recording sites spaced 120\mu m apart for good signal isolation. To facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. Curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5k\Omega to 6.0k\Omega with frequency changing from 10\,k to 10MHz. %K MEMS %K extracellular recording %K microelectrode
可植入多通道 %K 微电极 %K 硅元素 %K 物理 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=51EC29F0F1FE47969E669990FE7053A4&yid=A732AF04DDA03BB3&vid=7801E6FC5AE9020C&iid=DF92D298D3FF1E6E&sid=A9317EEC1ECC2EAF&eid=25F460E3298FB693&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=14