%0 Journal Article
%T A novel implantable multichannel silicon-based microelectrode
%A Sui Xiao-Hong
%A Zhang Ruo-Xin
%A Pei Wei-Hua
%A Chen Hong-Da
%A
隋晓红
%A 张若昕
%A 裴为华
%A 陈弘达
%J 中国物理 B
%D 2007
%I
%X Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. The fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. The manufacturing process by micro-electromechanical system (MEMS) technology was detailed with four photolithographic masks. The microscopic photographs and SEM images indicated that the probe shank was 3mm long, 100\mum wide and 20\mu m thick with the recording sites spaced 120\mu m apart for good signal isolation. To facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. Curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5k\Omega to 6.0k\Omega with frequency changing from 10\,k to 10MHz.
%K MEMS
%K extracellular recording
%K microelectrode
可植入多通道
%K 微电极
%K 硅元素
%K 物理
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=51EC29F0F1FE47969E669990FE7053A4&yid=A732AF04DDA03BB3&vid=7801E6FC5AE9020C&iid=DF92D298D3FF1E6E&sid=A9317EEC1ECC2EAF&eid=25F460E3298FB693&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=14