%0 Journal Article
%T Surface properties of diamond-like carbon films prepared by CVD and PVD methods
%A Liu Dong-Ping
%A Liu Yan-Hong
%A Chen Bao-Xiang
%A <br>刘东平
%A 刘艳红
%A 陈宝祥
%J 中国物理 B
%D 2006
%I 
%X Diamond-like carbon (DLC) films have been deposited using three different techniques: (a) electron cyclotron resonance---plasma source ion implantation, (b) low-pressure dielectric barrier discharge, (c) filtered---pulsed cathodic arc discharge. The surface and mechanical properties of these films are compared using atomic force microscope-based tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp$^{3}$ hybridized carbon while the soft surface layers of tetrahedral amorphous carbon (ta-C) films have graphite-like structure. The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp$^{3}$ hybridized carbon enriched surface layers. The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma.
%K diamond-like carbon film
%K film deposition
%K atomic force microscope<br>表面特性
%K 类金刚石碳薄膜
%K CVD法
%K PVD法
%K 薄膜沉积
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=5C0C2B66BB2413EC48FE2803CF1CE807&yid=37904DC365DD7266&vid=23CCDDCD68FFCC2F&iid=38B194292C032A66&sid=E406B4E9A1BA9D8C&eid=57EA20F731155703&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=24