%0 Journal Article
%T Deposition of carbon nitride films for space application
%A Feng Yu-Dong
%A Xu Chao
%A Wang Yi
%A Zhang Fu-Jia
%A <br>冯煜东
%A 胥　超
%A 王　艺
%A 张福甲
%J 中国物理 B
%D 2006
%I 
%X Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.
%K CNx film
%K hardness
%K atomic oxygen
%K cold welding
%K friction
%K wear<br>CNx薄膜
%K 硬度
%K 氧原子
%K 冷焊接
%K 摩擦力
%K 磨损
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=C100B76C13CEB8DC2D3CF936608ECD42&yid=37904DC365DD7266&vid=23CCDDCD68FFCC2F&iid=5D311CA918CA9A03&sid=3A61856D91CF5877&eid=E7AA5D9F9796332E&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=15