%0 Journal Article
%T A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM<br>
%A HE YUAN-JIN
%A DONG YUE-MEI
%A DUAN XIAO-DONG
%A <br>
%J 中国物理 B
%D 1994
%I 
%X An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=CD8D6A6897B9334F09D8D1648C376FB4&aid=D8A55432C88DE38AC1EB78E92D58A144&yid=3EBE383EEA0A6494&vid=38B194292C032A66&iid=5D311CA918CA9A03&sid=7FAAB0292FA0D5D0&eid=6837BC93241057EF&journal_id=1009-1963&journal_name=中国物理&referenced_num=0&reference_num=0