%0 Journal Article
%T Microstructure Control of Nanoporous Silica Thin Film Prepared by Sol-gel Process
%A Yiqun XIAO
%A Jun SHEN
%A Zhiyong XIE
%A Bin ZHOU
%A Guangming WU
%A <br>Yiqun
%A XIAO
%A Jun
%A SHEN
%A Zhiyong
%A XIE
%A Bin
%A ZHOU
%A Guangming
%A WU
%J 材料科学技术学报
%D 2007
%I 
%X Nanoporous silica films were prepared by sol-gel process with base, acid and base/acid two-step catalysis.Transmission electron microscope (TEM) and particle size analyzer were used to characterize the microstructure and the particle size distribution of the sols. Scanning electron microscopy (SEM), atomic force microscopy (AFM) and spectroscopic ellipsometer were used to characterize the surface microstructure and the optical properties of the silica films. Stability of the sols during long-term storage was investigated. Moreover,the dispersion relation of the optical constants of the silica films, and the control of the microstructure and properties of the films by changing the catalysis conditions during sol-gel process were also discussed.
%K Sol-gel
%K Nanoporous
%K Microstructure
%K Optical constants<br>二氧化硅薄膜
%K 光学常数
%K 微结构
%K 溶胶-凝胶法
%K 纳米多孔石英薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=EFB063205C897786&yid=A732AF04DDA03BB3&vid=EA389574707BDED3&iid=E158A972A605785F&sid=9B1D77939DDB4B89&eid=37F781FD8E744761&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=20