%0 Journal Article %T High Coercive NdFeB Thin Film Obtained by Diffusion Annealing %A MJKim %A YBKim %A CBSong %A YLi %A DSSuhr %A COKim %A TKKim %A
%J 材料科学技术学报 %D 2000 %I %X The magnetic properties and microstructure of diffusion annealed Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The films were deposited on Si substrate with various thickness ratio of Nd/NdFeB layer (R=0 similar to 3.3), then diffused and crystallized by annealing at 650 degrees C for 10 min. The film without Nd layer showed soft magnetic behavior and high content of alpha-Fe phase. The films with R greater than or equal to 1 showed good hard magnetic properties with the high coercivity of about 20 kOe. %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=D06A9ED0AFE0F2F746B2AF3CB1142382&yid=9806D0D4EAA9BED3&vid=7801E6FC5AE9020C&iid=0B39A22176CE99FB&sid=480C51B1F0CE0AB6&eid=4BB057F167CF3A60&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=0