%0 Journal Article
%T Low Temperature Synthesis of Diamond Films by CVD of Combined Lasers
%A Zhongchao FENG
%A Yan ZHAO
%A Binchun ZHANG
%A Yaqing WANG
%A Zhengang WU
%A <br>
%J 材料科学技术学报
%D 1998
%I 
%X Diamond films have been synthesized by means of LCVD through combined effects of a XeCl ultraviolet laser and an infrared CO2 laser. A special apparatus has been developed. The conditions of synthesis and the roles played by both lasers were studied. High-purity diamond films were deposited on Si substrates at 340℃.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=C543650C2A216ABB&yid=8CAA3A429E3EA654&vid=F3583C8E78166B9E&iid=CA4FD0336C81A37A&sid=E203FB1A272C9DD2&eid=0D0D661F0B316AD5&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=0