%0 Journal Article
%T Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films
%A Huayu ZHANG
%A Liangxue LIU
%A Yulei WANG
%A Hongtao MA
%A Fanxin LIU
%A <br>Huayu
%A ZHANG
%A Liang-xue
%A LIU
%A Yulei
%A WANG
%A Hongtao
%A MA
%A Fanxin
%A LIU
%J 材料科学技术学报
%D 2007
%I 
%X Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal N-sp3C and N-sp2C structure. With increasing the N2 flow, sp3C decreases from 73.74% down to 42.66%, and so does N-sp3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young's modulus from 193.03 GPa down to 144.52 GPa.
%K Nitrogen doped diamond-like carbon films
%K ECR-CVD
%K Structure
%K Mechanical performance<br>氮杂质钻石形状碳薄膜
%K 电镀回旋加速器共振-化学药品蒸气沉淀
%K 结构
%K 机械性质
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=F1839B40C8AE1F67E7B415993CD11334&yid=A732AF04DDA03BB3&vid=EA389574707BDED3&iid=E158A972A605785F&sid=ABF2590617D31FFD&eid=3F419E61BD389CC8&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=24