%0 Journal Article
%T Characterization of the Diamond-like Carbon Based Functionally Gradient Film<br>Characterization of the Diamond—like Carbon based Functionally Gradient Film
%A Feng MA
%A Xun CAI
%A Gang LI
%A Qiulong CHEN
%A Hongtao MA
%A <br>FengMA
%A XunCAI
%A GangLI
%A QiulongCHEN
%A HongtaoMA
%J 材料科学技术学报
%D 2002
%I 
%X Diamond-like carbon coatings have been used as solid lubricating coatings in vacuum technology for their good physical and chemical properties. In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (Plll) was adopted to fabricate diamond-like carbon-based functionally gradient film, N/TiN/Ti(N,C)/DLC, on the 304 stainless steel substrate. The film was characterized by using Raman spectroscopy and glancing X-ray diffraction (GXRD), and the topography and surface roughness of the film was observed using AFM. The mechanical properties of the film were evaluated by nano-indentation. The results showed that the surface roughness of the film was approximately 0.732 nm. The hardness and elastic modulus, fracture toughness and interfacial fracture toughness of N/TiN/Ti(N,C)/DLC functionally gradient film were about 19.84 GPa, 190.03 GPa, 3.75 MRa.m1/2 and 5.68 MPa.m1/2, respectively. Compared with that of DLC monolayer and C/TiC/DLC multilayer, this DLC gradient film has better qualities as a solid lubricating coating.
%K Diamond like carbon
%K Nano-indentation
%K Raman scattering spectroscopy
%K AFM<br>类金刚石
%K 功能
%K 梯度薄膜
%K 氮化钛
%K AFM
%K 拉曼散射光谱
%K 碳化钛
%K 结构
%K 304不锈钢
%K 表面涂层
%K 制备
%K 表面处理
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=34FEF98F5BF1CAB7E1CD4E9CFC97C321&yid=C3ACC247184A22C1&vid=13553B2D12F347E8&iid=94C357A881DFC066&sid=C66DE7562B0326E2&eid=0A0BD3F594F876C0&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=1&reference_num=0