%0 Journal Article
%T Simulations of Temperature Field in HFCVD Diamond Films over Large Area
%A Aiying WANG
%A Chao SUN
%A Rongfang HUANG
%A Lishi WEN
%A <br>
%J 材料科学技术学报
%D 2003
%I 
%X A three-dimensional model was developed to investigate the influence of various hot filaments parameters on substrate temper-ature fields that significantly affect the nucleation and growth of diamond films over large area by hot-filament chemical vapordeposition (HFCVD). Numerical simulated results indicated that substrate temperature varies as a function of hot filamentsnumber, radius, temperature, emissivity, the distance between filaments, and the distance between substrate and filamentsarrangement plane. When these filaments parameters were maintained at the optimal values, the homogeneous substrate tem-perature region of 76 mm×76 mm with the temperature fluctuation no more than 5% could be obtained by a 80 mm×80 mmhot filaments arrangement plane. Furthermore, the homogeneous region could be enlarged to 100 mm×100 mm under thecondition of supplementary hot filaments with appropriate parameters. All of these calculations provided the basis for speciallyoptimizing the hot filaments parameters to deposit uniform diamond film over large area by HFCVD.
%K HFCVD
%K Diamond film
%K Temperature field
%K Simulation<br>HFCVD
%K 宝石膜
%K 温度场
%K 模拟
%K 基质温度
%K 金刚石膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=F444F11962DC8C8C&yid=D43C4A19B2EE3C0A&vid=2A8D03AD8076A2E3&iid=CA4FD0336C81A37A&sid=BC12EA701C895178&eid=96C778EE049EE47D&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=27