%0 Journal Article
%T Reduction of Coercivity of Fe-N Soft Magnetic Film by Heat Treatment
%A Dan LI
%A Yousong GU
%A Xiangrong CHANG
%A Fushen LI
%A Lijie QIAO
%A Zhongzhuo TIAN
%A <br>Dan LI
%A Yousong GU
%A Xiangrong CHANG
%A Fushen LI
%A Lijie QIAO and Zhongzhuo TIAN
%J 材料科学技术学报
%D 2003
%I 
%X 200 nm thick Fe-N magnetic thin films were deposited on glass substrates by RF sputtering. The as-deposited films havehigh saturation magnetization but their coercivity is also higher than what is needed Therefore it is very important to reducecoercivity.The samples were vacuum annealed at 250℃ under 12000 A/m magnetic field. When the N content was in therange of 5～7 at. pct, the thin films consisted of α'+α" after heat treatment and had excellent soft magnetic properties of4πM_s=2.4 T, H_C<80 A/m. However, the thickness of a recording head was 2 μm, and H_c increased as thickness increased.In order to reduce the H_c, the sputtering power was raised from 200 W to 1000 W to reduce the grain size. 2 μm Fe-N thin
%K Fe-N
%K Soft magnetic film
%K Coercivity<br>铁氮软磁薄膜
%K 磁性材料
%K 热处理
%K 矫顽磁性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=8C3B204285F26973&yid=D43C4A19B2EE3C0A&vid=2A8D03AD8076A2E3&iid=94C357A881DFC066&sid=ABF2590617D31FFD&eid=3F419E61BD389CC8&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=1&reference_num=17