%0 Journal Article
%T Preparation of YBa_2Cu_3O_(7-x) Superconductor Film by Ion Beam Sputtering
%A HU Qingyu WEN Lishi QIAO Guiwen ZHUANG Yuzhi Institute of Metal Research
%A Academia Sinica
%A Shenyang
%A China
%A <br>胡倾宇
%A 闻立时
%A 乔桂文
%A 庄育智
%J 材料科学技术学报
%D 1989
%I 
%X Since the discovery of high T_c super-conductor, much effort was made toits application. More and more evidencehas revealed that most promising fieldof high T_c superconductor first to havesuccess must be the microelectronics andcomputer. Superconductor films for mi-croelectronic application are preparedby PVD method, such as electron beamevaporation, pulsed laser evaporation andmagnetron sputtering. In this paper, thepreliminary results of ion beam sputteringdeposition of YBaCuO film are reported
%K superconductor film
%K ion beam sputtering<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=716FDDEE5AF28754&yid=1833A6AA51F779C1&vid=94C357A881DFC066&iid=94C357A881DFC066&sid=2E41258BCB9A7DB2&eid=869B6F3117981EC4&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=0