%0 Journal Article
%T Effects of substrate temperature on properties for transparent conducting ZnO: Al films on organic substrate deposited by r.f. sputtering<br>Effects of Substrate Temperature on Properties for Transparent Conducting ZnO:Al Films on Organic Substrate Deposited by r.f. Sputtering
%A Deheng ZHANG
%A Dejun ZHANG
%A Qingpu WANG
%A Tianlin YANG
%A <br>
%J 材料科学技术学报
%D 2001
%I 
%X This paper presents the substrate temperature dependence of opto-electrical properties for transparent conducting Al-doped ZnO films prepared on polyisocyanate (PI) substrates by r.f. sputtering. Polycrystalline ZnO:Al films with good adherence to the substrates having a (002) preferred orientation have been obtained with resistivities in the range from 4.1 x 10(-3) to 5.3 x 10(-4) Ohm .cm, carrier densities more than 2.6 x 10(20) cm(-3) and Hall mobilities between 5.78 and 13.11 cm(2)/V/s for films. The average transmittance reaches 75% in the visible spectrum. The quality of obtained films depends on substrate temperature during film fabrication.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=324DC3CAB22330DB19158AE0A9B7BFA5&aid=19DA48FC05008E36&yid=14E7EF987E4155E6&vid=BCA2697F357F2001&iid=94C357A881DFC066&sid=5A751AE9FA58A3FB&eid=F3A3627BFEF439C1&journal_id=1005-0302&journal_name=材料科学技术学报&referenced_num=0&reference_num=0