%0 Journal Article %T The structure and hydrogen storage characteristic of magnetron sputtering Ti--base alloy films
磁控溅射Ti合金薄膜结构特征及贮氢性能 %A MA Aihua %A ZHENG Hua %A LIU Shi %A WANG Longbao %A
马爱华 %A 郑华 %A 于洪波 %A 刘实 %A 王隆保 %J 材料研究学报 %D 2005 %I %X The magnetron sputtering method was used to prepare Ti-base alloy films. The concentration of the alloy elements such as Mo, Zr and Al in the films is consistent with that in the targets, while the Y concentration has a large deviation from that in the targets. The hydrogen absorption dynamics of the four films at 673 K is fine and the TiZrYAI film has the best hydriding activity. The hydrogen storage capacities of all the four films exceed 1.5 (H/M). The hydrogen absorption P-C isotherms of the films were measured. The films alloying with Mo have the highest hydrogen absorption equilibrium pressure, which is determined as about 10-4 Pa at ambient temperature. %K metallic materials %K magnetron sputtering %K Ti alloy film %K hydrogen storage
金属材料 %K 磁控溅射 %K Ti合金薄膜 %K 贮氢 %K 磁控溅射 %K 合金薄膜 %K 结构特征 %K 贮氢性能 %K films %K alloy %K magnetron %K sputtering %K storage %K characteristic %K hydrogen %K 室温 %K 外推 %K 吸氢平衡压 %K 曲线 %K 饱和吸氢量 %K 现象 %K 脱膜 %K 吸氢动力学性能 %K 膜材 %K 工艺 %K 偏差 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=D48A6684E5F8ADD4&yid=2DD7160C83D0ACED&vid=2A8D03AD8076A2E3&iid=CA4FD0336C81A37A&sid=0401E2DB1F51F8DE&eid=4F2F18DD6F870C2C&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=1&reference_num=12