%0 Journal Article
%T Investigation of self-assembly growth and thermal stability of Au nano-particles on atomic-layer-deposited Al2O3 film<br>
%A HUANG Yue
%A LIAO Zhongwei
%A GOU Hongyan
%A DING Shijin
%A ZHANG Wei
%A <br>
%J 材料研究学报
%D 2009
%I 
%X The self-assembly growth of Au nano-particles on atomic-layer-deposited (ALD) Al2O3 thin film has been achieved. And the self-assembly process and the thermal stability have been investigated.The results show that the ALD Al2O3 film is inclined to adsorb (3-Aminopropyl)-trimethoxysilane (APTMS), which is in favor of self-assembly growth of Au nano-particles. The resulting Au nano-particles are mainly in the range of 5–8 nm with a density of nearly 4×1011cm 2. The annealing at 300   in N2 leads to an increase in the dimension of Au nano-particles, however, the good adsorption of APTMS and the chemical compositions of Au nano-particles are maintained. When the annealing temperature elevates to 450  , Au nano-particles exhibit severe agglomeration together with extreme nonuniformilty.
%K metallic materials
%K self-assembly growth
%K Au nano-particles
%K thermal stability<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=F63627FF2EAAF62A5E5E28D447F6D94A&yid=DE12191FBD62783C&vid=EA389574707BDED3&iid=CA4FD0336C81A37A&sid=FC0714F8D2EB605D&eid=7801E6FC5AE9020C&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=0&reference_num=1