%0 Journal Article
%T THE STRUCTURE AND PIEZO-RESISTANCE EFFECT OF HYDROGENATED NANO-Si FILMS<br>纳米Si薄膜的结构及压阻效应
%A HE Yuhang
%A WU Xuhui
%A LIN Hongyi
%A YU Mingbin
%A YU Xiaomei
%A WANG Heng
%A LI Chong
%A <br>何宇亮
%A 林鸿溢
%A 武旭辉
%A 余明斌
%A 于晓梅
%A 王珩
%A 李冲
%J 材料研究学报
%D 1996
%I 
%X In this report Authors employed the HREM and STM to detect the micro-structure of nc-Si:H films, which are fabricated by the PECVD deposition method. The nc-Si:H films are consisted with a mass of micro-grains and a great deal of interfaces among grains. The unique structrue character of nc-Si:H films is the main reason for the largest piezo-resistance effect and a higher value of hydrogen content in the films. The relationship of microstructure and the piezo-resistance effect of films were discussed. It is suggested that the nc-Si: H film may becbme an idealized sensor materials.
%K an-rystalline silicon film peizo-resistance effect micro-structure freely supported method<br>压阻效应
%K 微结构
%K 简支梁法
%K 硅薄膜
%K 纳米硅薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=DCB848BC7DA1A510&yid=8A15F8B0AA0E5323&vid=F3090AE9B60B7ED1&iid=CA4FD0336C81A37A&sid=27746BCEEE58E9DC&eid=16D8618C6164A3ED&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=4&reference_num=11