%0 Journal Article
%T Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings<br>
%A LING Xiu-Lan
%A ZHAO Yuan-An
%A LI Da-Wei
%A ZHOU Ming
%A SHAO Jian-Da
%A FANZheng-Xiu
%A <br>
%J 中国物理快报
%D 2009
%I 
%X In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.
%K 42
%K 79
%K Wc
%K 81
%K 70
%K Fy
%K 81
%K 70
%K Jb<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=1A19CAA78521292013244E19F92A87FF&yid=DE12191FBD62783C&vid=96C778EE049EE47D&iid=DF92D298D3FF1E6E&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0