%0 Journal Article
%T ON THE COMPOSITION, PHASE STRUCTURE AND OXIDIZED PROPERTY OF AIN FILMS<br>AlN薄膜的成分,相结构和氧化性能
%A XIA Lifang
%A WANG Zuochen
%A SUN Yue
%A MA Xinxin
%A CHEN Shifang
%A <br>夏立芳
%A 王佐诚
%A 孙跃
%A 马欣新
%A 陈士芳
%J 材料研究学报
%D 1995
%I 
%X The composition, phase structure and oxidized property of AIN films heated in atmosphere at different temperature have been investigated with X-ray photoelectron spectroscopy(XPS) in this paper.The results showed that about 60nm thick of Al2O3 film on the
%K AIN film oxidized property thermodynamics<br>薄膜
%K 氧化
%K 靶材
%K 气相介质
%K 氮化铝
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=BF469665AA4AA6DFD7BDB17ED2104785&yid=BBCD5003575B2B5F&vid=9CF7A0430CBB2DFD&iid=E158A972A605785F&sid=3E3EF0DB5E6F2DA9&eid=8C27CCA578E52082&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=2&reference_num=2