%0 Journal Article
%T Controllable Ultra Low- k by Via-Typed Air Gap with the Better Design Margin for Logic Devices below 45nm Node<br>
%A CHOI Youn-Ok
%A KIM Sang-Yong
%A <br>
%J 中国物理快报
%D 2010
%I 
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=88E211EC05D625375554718DB6DDFC35&yid=140ECF96957D60B2&vid=DB817633AA4F79B9&iid=9CF7A0430CBB2DFD&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0