%0 Journal Article
%T Deflection Reduction of GaN Wafer Bowing by Coating or Cutting Grooves in the Substrates<br>
%A SUN Tao
%A WANG Ming-Qing
%A SUN Yong-Jian
%A WANG Bo-Ping
%A ZHANG Guo-Yi
%A TONG Yu-Zhen
%A DUAN Hui-Ling
%A <br>
%J 中国物理快报
%D 2011
%I 
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=CED540E171A8D024D508764690A17AFC&yid=9377ED8094509821&vid=D3E34374A0D77D7F&iid=E158A972A605785F&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0