%0 Journal Article
%T THE INFLUENCES OF TEMPERATURE FIELD ON LARGE AREA DIAMOND GROWTH OF DIAMOND FILM BY HFCVD<br>温度场对热丝化学气相沉积大面积生长金刚石膜的影响
%A CHAN Yan
%A HUANG Rongfang
%A WEN Lishi
%A SHI Chuangxu
%A <br>陈岩
%A 黄荣芳
%A 闻立时
%A 师昌绪
%J 材料研究学报
%D 1995
%I 
%X The large area temperature field was formed through large area planary arrangment of parallel W filament arrangment. and the temperature distribution of temperature field was measured. The results have shown that an uniform temperature region of 70×70mmwi
%K HFCVD
%K diamond film
%K temperature field<br>气相沉积
%K 金刚石薄膜
%K 温度场
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=B25AFEC192B20E41&yid=BBCD5003575B2B5F&vid=9CF7A0430CBB2DFD&iid=38B194292C032A66&sid=E2E0FBFE4D7EFB94&eid=D537C66B6404FE57&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=5&reference_num=1