%0 Journal Article
%T Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition<br>
%A GUO Xiao-Song
%A ZHANG Shan-Shan
%A BAO Zhong
%A ZHANG Hong-Liang
%A CHEN Chang-Cheng
%A LIU Li-Xin
%A LIU Yan-Xia
%A XIE Er-Qing
%A <br>
%J 中国物理快报
%D 2011
%I 
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=B2E3E5A2079D01801B9F5B82307D84D5&yid=9377ED8094509821&vid=D3E34374A0D77D7F&iid=0B39A22176CE99FB&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0