%0 Journal Article
%T PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS<br>氮化铁梯度薄膜的制备
%A JIANG Enyong
%A LIU Hui
%A LIU Mingsheng
%A LIN Chuan
%A <br>姜恩永
%A 刘晖
%A 刘明升
%A 林川
%A 孙多春
%J 材料研究学报
%D 1995
%I 
%X In this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surf
%K facing targets sputtering
%K iron nitrides thin films
%K functionally gradient thin films
%K Rutherford backscattering spectrometry<br>对向靶溅射
%K 氮化铁薄膜
%K 梯度薄膜
%K 卢瑟福背散射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=C101C4C04993B4D94FCD8446E6CBEB3B&aid=66B999744E0F02EE&yid=BBCD5003575B2B5F&vid=9CF7A0430CBB2DFD&iid=CA4FD0336C81A37A&sid=771152D1ADC1C0EB&eid=318E4CC20AED4940&journal_id=1005-3093&journal_name=材料研究学报&referenced_num=3&reference_num=1