%0 Journal Article
%T Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films<br>
%A XIAO Xiu-Di
%A DONG Guo-Ping
%A QI Hong-Ji
%A FAN Zheng-Xiu
%A HE Hong-Bo
%A SHAO Jian-Da
%A <br>
%J 中国物理快报
%D 2008
%I 
%X The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
%K 68
%K 37
%K Hk
%K 81
%K 07
%K Be
%K 81
%K 40
%K Ef<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=9C0C6240A89711878261204331AEA522&yid=67289AFF6305E306&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=ECE3F3ADB976FF7B&eid=2388B0C36A6A2DBD&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0