%0 Journal Article
%T Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna<br>
%A LI Lin-Sen
%A XU Xu
%A LIU Feng
%A ZHOU Qian-Hong
%A NIE Zong-Fu
%A LIANG Yi-Zi
%A LIANG Rong-Qing
%A <br>
%J 中国物理快报
%D 2008
%I 
%X Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.
%K 52
%K 35
%K Hr
%K 52
%K 50
%K Dg<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=38B85CF01906B3E0B2EC6E35E047CB59&yid=67289AFF6305E306&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=A48AABF0E342FE4B&eid=5CB8736A52F634C6&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0