%0 Journal Article %T Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna
%A LI Lin-Sen %A XU Xu %A LIU Feng %A ZHOU Qian-Hong %A NIE Zong-Fu %A LIANG Yi-Zi %A LIANG Rong-Qing %A
%J 中国物理快报 %D 2008 %I %X Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results. %K 52 %K 35 %K Hr %K 52 %K 50 %K Dg
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=38B85CF01906B3E0B2EC6E35E047CB59&yid=67289AFF6305E306&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=A48AABF0E342FE4B&eid=5CB8736A52F634C6&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0