%0 Journal Article
%T Temperature and Thickness Effects on Electrical Properties of InP Films Deposited by Spray Pyrolysis
%A Refik Kayali
%A Mehmet Ari
%A Mustafa
%A ztacs
%A Metin Bedir
%A Funda Aksoy
%A
%J 中国物理快报
%D 2009
%I
%X InP film samples are prepared by spray pyrolysis technique using aqueous solutions of InCl3 and Na2HPO4, which are atomized with compressed air as carrier gas onto glass substrates at 500°C with different thicknesses of the films. The structural properties of the samples are determined by x-ray diffraction (XRD). It is found that the crystal structure of the InP films is polycrystalline hexagonal. The orientations of all the obtained films are along the c-axis perpendicular to the substrate. The electrical measurements of the samples are obtained by dc four-probe technique on rectangular-shape samples. The effects of temperature on the electrical properties of the InP films are studied in detail.
%K 71
%K 20
%K Nr
%K 72
%K 80
%K Ey
%K 73
%K 61
%K Ey
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=6BE7B5330C039C436470252DCFEFD1E8&yid=DE12191FBD62783C&vid=96C778EE049EE47D&iid=CA4FD0336C81A37A&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0