%0 Journal Article
%T Analysis and Determination of Refractive Index Profiles of O2+ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques<br>Analysis and Determination of Refractive Index Profiles of O^2＋ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques
%A LIU Han-Ping
%A LU Fei
%A WANG Xue-Lin
%A YANG Tian-Lin
%A LV Ying-Bo
%A LI Yan-Hui
%A LIU Xiang-Zhi
%A ZHANG Rui-Feng
%A SONG Qiang
%A MA Xue-Jian
%A <br>刘汉平
%A 卢霏
%A 王雪林
%A 杨田林
%A 吕英波
%A 李延辉
%A 刘祥志
%A 张瑞锋
%A 宋强
%A 马学见
%J 中国物理快报
%D 2008
%I 
%X The refractive index profiles of 3MeV O2+ ion-implanted planar waveguides in lithium niobate are reconstructed based on etching and ellipsometry techniques. SRIM2003 code is used to simulate the damage distribution in waveguide. It is demonstrated that the index profile of this kind of waveguide, extending to several micrometres in depth, can be determined byetching in combination with following ellipsometric measurements. A good agreement is found between the simulated damage distributions in waveguide and the index profiles based on experimental data, and thewidth of refractive index barrier is wider than the result of SRIM2003.
%K 42
%K 79
%K Gn
%K 61
%K 80
%K Jh
%K 52
%K 77
%K Bn
%K 07
%K 60
%K Fs<br>平面波导
%K 铌酸锂
%K 氧离子注入
%K 折射率
%K 测量方法
%K 椭圆光度法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=605AA18084F9F78A25762D486B270808&yid=67289AFF6305E306&vid=C5154311167311FE&iid=CA4FD0336C81A37A&sid=3F0AF5EDBC960DB0&eid=BA79719BCA7341D5&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=15