%0 Journal Article
%T Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique
%A BAI Su-Yuan
%A TANG Zhen-An
%A HUANG Zheng-Xing
%A YU Jun
%A WANG Jia-Qi
%A <br>白素媛
%A 唐祯安
%A 黄正兴
%A 余隽
%A 汪家奇
%J 中国物理快报
%D 2008
%I 
%X Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interracial thermal resistance. The results show that the average thermal conductivity of 330- 1000nm aluminium oxide thin films is 3.3 Wm^-1K^-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.
%K 44
%K 10
%K +i
%K 66
%K 70
%K -f<br>三氧化二铝薄膜
%K 传热率
%K 测量方法
%K 瞬时热反射技术
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=8C8729F5DCF9081F7DCE7237051E9E09&yid=67289AFF6305E306&vid=C5154311167311FE&iid=0B39A22176CE99FB&sid=2EAE52BA5B1222A9&eid=6341CCF6B158C5F9&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=0