%0 Journal Article %T AlGaN-Based Solar-Blind Schottky Photodetectors Fabricated on AlN/Sapphire Template %A SANG Li-Wen %A QIN Zhi-Xin %A CEN Long-Bin %A SHEN Bo %A ZHANG Guo-Yi %A LI Shu-Ping %A CHEN Hang-Yang %A LIU Da-Yi %A KANG Jun-Yong %A CHENG Cai-Jing %A ZHAO Hong-Yan %A LU Zheng-Xiong %A DING Jia-Xin %A ZHAO Lan %A SI Jun-Jie %A SUN Wei-Guo %A
%J 中国物理快报 %D 2008 %I %X We report AlGaN-based back-illuminated solar-blind Schottky-type ultraviolet photodetectors with the cutoff-wavelength from 280nm to 292nm without bias. The devices show low dark current of 2.1i×10-6A/cm2 at the reversebias of 5V. The specific detectivity D* is estimated to be 3.3×1012cmHz1/2W-1 . To guarantee the performance of the photodetectors, the optimization of AlGaN growth and annealing condition for Schottky contacts were performed. The results show that high-temperature annealing method for Ni/Pt Schottky contacts is effective for the reduction of leakage current. %K 73 %K 40 %K Kp %K 85 %K 60 %K Gz %K 81 %K 05 %K Ea
光电探测器 %K 氮化铝 %K 蓝宝石 %K AlGaN %K 波长 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=1D0474879B98179EDCF376F98AB3B7F4&yid=67289AFF6305E306&vid=C5154311167311FE&iid=CA4FD0336C81A37A&sid=B799C1769FCACDC8&eid=4D7D059FFBF006B9&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=10