%0 Journal Article
%T Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology
%A ZHEN Wan-Bao
%A LIU Wei-Li
%A SONG Zhi-Tang
%A FENG Song-Lin
%A ZHU Shi-Fu
%A ZHAO Bei-Jun
%A <br>甄万宝
%A 刘卫丽
%A 宋志棠
%A 封松林
%A 朱世富
%A 赵北君
%J 中国物理快报
%D 2004
%I 
%X A single crystal Si thin film on a glass substrate has been obtained successfully by hydrophilic fusion bonding and the smart-cut technology. Tensile strength testing shows that the bonded interface has strong adhesion and the bonding strength is about 8.7MPa. Crystallinity and microstructure of the samples have been characterized by transmission electron microscopy (TEM). Electrical properties have also been investigated by Hall measurements and four-point probe. The mobility of the transferred Si layer on glass is about 122cm2/V.s. The results show that the single-crystal silicon layer transferred onto glass by direct bonding keeps good quality for the applications of integrated circuits, transducers, and flat panel display.
%K 81
%K 05
%K -t
%K 73
%K 61
%K Cw<br>简单硅晶体层
%K 薄膜
%K 亲水聚变耦合
%K 抗张强度
%K 微观结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=E27DA92E19FE279A273627875A70D74D&aid=487FD7E153074242483D16F44E28008B&yid=D0E58B75BFD8E51C&vid=659D3B06EBF534A7&iid=59906B3B2830C2C5&sid=2B3D90A54BCBF9B2&eid=BB05CDB9D5F57A2E&journal_id=0256-307X&journal_name=中国物理快报&referenced_num=0&reference_num=13