%0 Journal Article
%T Characteristics of a novel biaxial capacitive MEMS accelerometer<br>新型双向电容式MEMS加速度计特性分析
%A Dong Linxi
%A Li Yongjie
%A Yan Haixia
%A Sun Lingling
%A <br>董林玺
%A 李永杰
%A 颜海霞
%A 孙玲玲
%J 半导体学报
%D 2010
%I 
%X A novel MEMS accelerometer with grid strip capacitors is developed.The mechanical and electrical noise can be reduced greatly for the novel structure design.ANSOFT-Maxwell software was used to analyze the fringing electric field of the grid strip structure and its effects on the designed accelerometer.The effects of the width,thickness and overlapping width of the grid strip on the sensing capacitance are analyzed by using the ANSOFT-Maxwell software.The results show that the parameters have little effect o...
%K MEMS
%K biaxial accelerometer
%K capacitor fringe effect
%K slide-film damping<br>微电子机械系统
%K 双向加速度计
%K 电容边缘效应
%K 滑膜阻尼
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=1D8F1F3D18E518E6F50C6162254597F1&yid=140ECF96957D60B2&vid=4AD960B5AD2D111A&iid=94C357A881DFC066&sid=CEA8C36EECEB7DAC&eid=B31275AF3241DB2D&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=2