%0 Journal Article
%T Model of Non-Normal Process Capability Indices to Semiconductor Quality Control<br>半导体质量控制中的非正态工序能力指数计算模型
%A Wang Shaoxi
%A Jia Xinzhang
%A <br>王少熙
%A 贾新章
%J 半导体学报
%D 2007
%I 
%X It is necessary to compute the process capability index (PCI) of non-normal data when considering the level of semiconductor processes.Several main PCIs that have already been presented are analyzed,and their advantages and disadvantages are presented.Based on Chebyshev-Hermite polynomials,a model for computing non-normal PCIs is then given when regarding the fact that these four moments,i.e.mean,standard deviation,skewness,and kurtosis,are suitable to approximately characterize the data distribution properties,which is effective when data deviation is large.Finally,an example is given for proving the relational model.
%K non-normal distribution
%K process capability index
%K Chebyshev-Hermite polynomials
%K quality control<br>非正态分布
%K 工序能力指数
%K 切比雪夫-埃尔米特多项式
%K 质量控制
%K 体质量控制
%K 非正态
%K 工序能力指数
%K 计算模型
%K Quality
%K Control
%K Semiconductor
%K Process
%K Capability
%K Indices
%K 实例分析
%K 简化计算
%K 计算公式
%K 代数
%K 影响
%K 结果
%K 数据偏差
%K 多项式
%K 埃尔米特
%K 切比雪夫
%K 结合
%K 分布特性
%K 变量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5171546930DB65D6&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=0B39A22176CE99FB&sid=0DEB7A8A66C33AAD&eid=FA89360EB995A8AD&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=18