%0 Journal Article
%T A multivariate process capability index model system<br>多变量工序能力指数系统模型
%A Wang Shaoxi
%A Wang Danghui
%A <br>王少熙
%A 王党辉
%J 半导体学报
%D 2011
%I 
%X This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process quality. The system method includes a spatial MPCI model for multivariate normal distribution data, MPCI model based on factor weight for multivariate no-normal distribution application, and MPCI model based on yield for yield application. At last, examples for calculating MPCI are given, and the experimental results show that this systematic method is effective and practical.
%K microelectronics process
%K multivariate
%K process capability index
%K yield
%K factor weight<br>过程能力指数
%K 模型体系
%K 多变量
%K 质量综合评价
%K 多元正态分布
%K 计算模型
%K 系统
%K 应用
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5443F9FDCA0BED09D9B03573E340BD7F&yid=9377ED8094509821&vid=9971A5E270697F23&iid=CA4FD0336C81A37A&sid=2AE5DC11D0AF1632&eid=DF92D298D3FF1E6E&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=0