%0 Journal Article
%T Elastic-Plastic Mechanical Properties of AlxGa1-xN Thin Films with High Al Composition<br>高Al组分AlxGa1-xN薄膜的弹性-塑性力学性质
%A Xu Fujun
%A Shen Bo
%A Wang Maojun
%A Xu jian
%A Miao Zhenlin
%A Yang Zhijian
%A Qin Zhixin
%A Zhang Guoyi
%A Lin Bing
%A Bai Shulin
%A <br>许福军
%A 沈波
%A 王茂俊
%A 许谏
%A 苗振林
%A 杨志坚
%A 秦志新
%A 张国义
%A 蔺冰
%A 白树林
%J 半导体学报
%D 2007
%I 
%X The elastic-plastic mechanical properties of AlxGa1-xN thin films with high Al composition are investigated by the nano-indentation technique.It is found that the Young's modulus E of the films and the shear stress to produce the plastic deformation in AlxGa1-xN films increase with increasing Al composition,while the occurrence of the clear and sudden displacement discontinuity("pop-in")in the plastic deformation(PD)process decreases.With increasing Al composition,it is believed that the increase of the bond strength and the decrease of the stress due to the lesser lattice mismatch between AlxGa1-xN films and AlN/sapphire templates result in more resistance to the formation of dislocations,which is responsible for the "pop-in" behavior in AlxGa1-xN films.
%K AlxGa1-xN
%K Young's modulus
%K mechanical properties
%K plastic deformation<br>AlxGa1-xN薄膜
%K 杨氏模量
%K 力学性质
%K 塑性形变
%K 组分
%K 薄膜
%K 弹性
%K 塑性形变
%K 力学性质
%K Composition
%K High
%K Thin
%K Films
%K 阻力
%K 中新
%K 因素
%K 晶格失配
%K sapphire
%K 增强
%K 键能
%K 发现
%K 位移不连续
%K 纳米压痕实验
%K 剪切应力
%K 杨氏模量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5646F94D35B54F6F79469E441383B012&yid=A732AF04DDA03BB3&vid=D3E34374A0D77D7F&iid=F3090AE9B60B7ED1&sid=044F0D973C30117E&eid=EE882EEBF9236453&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=16