%0 Journal Article
%T Study of a New Pattern of Omni-Directional Reflector AlGaInP Thin-Film Light-Emitting Diodes<br>一种新型全方位反射AlGaInP薄膜发光二极管
%A Gao Wei
%A Zou Deshu
%A Li Jianjun
%A Guo Weiling
%A Shen Guangdi
%A <br>高伟
%A 邹德恕
%A 李建军
%A 郭伟玲
%A 沈光地
%J 半导体学报
%D 2008
%I 
%X A novel AlGaInP thin-film light emitting diode(LED)with an omni directional reflector structure is proposed and the corresponding fabrication process is developed.The omni-directional reflector was realized by the combination of a GaAs epi-wafer,SiO2 with conductive micro-contacts,and Au.The LED structure and Si substrate carrier were then brought into contact using silver-loaded epoxy.Then,the GaAs substrate was removed and stopped on the etching stop layer.After the etching stop layer was removed,a thin A...
%K AlGaInP
%K thin-film light-emitting diode
%K omni-directional reflector<br>铝镓铟磷
%K 薄膜发光二极管
%K 全方位反射镜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=17412525DC5E36BF191634276C948FC4&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=E158A972A605785F&sid=8A6D8366EA57F0FF&eid=04CF423CEE45E258&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=4