%0 Journal Article
%T Design and fabrication of an InP arrayed waveguide grating for monolithic PICs<br>用于单片集成的InP阵列波导光栅设计和制备
%A Pan Pan
%A An Junming
%A Wang Liangliang
%A Wu Yuand
%A Wang Yue
%A Hu Xiongwei
%A <br>潘盼
%A 安俊明
%A 王亮亮
%A 吴远大
%A 王玥
%A 胡雄伟
%J 半导体学报
%D 2012
%I 
%X InP arrayed waveguide grating (AWG) is a key unit in InP based monolithic multi-wavelength transmitter. A 10-channel, 200GHz channel spacing InP AWG was designed, and the deep ridge waveguide design makes it polarization independent. Under the technologies of molecular beam epitaxy, lithography, and induced coupler plasma etching, the chip was fabricated in our laboratory. The tested results show that the insertion loss is about -8dB, and the crosstalk is less than -17dB.
%K InP AWG
%K monolithic PICs
%K polarization independence<br>阵列波导光栅
%K InP
%K 设计
%K 制造
%K 太平洋
%K 分子束外延生长
%K 岛国
%K 单片
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=6054DFDC987AA8B2914B352F661C42E4&yid=99E9153A83D4CB11&vid=27746BCEEE58E9DC&iid=DF92D298D3FF1E6E&sid=71B327BD3EC1A098&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=11