%0 Journal Article
%T An Air-Bridge Inter-Connection Method for Microwave and High Temperature Devices<br>微波和高温器件的一种空气桥互连方法
%A Lin Ruobing
%A Wei Wei
%A Feng Qian
%A Wang Chong
%A Hao Yue
%A <br>林若兵
%A 魏巍
%A 冯倩
%A 王冲
%A 郝跃
%J 半导体学报
%D 2008
%I 
%X A flexible air-bridge method is proposed that is useful for high temperature microwave devices. This method makes use of different resists to give several resists as a sacrificial layer. After low temperature baking, a perfect arch sacrificial layer of bridges with a ratio higher than 60% is obtained. An air-bridge inter-connection structure with excellent characteristics and high reliability can be easily fabricated with this method.
%K air-bridge
%K arch
%K sacrificial layer technology<br>空气桥
%K 拱形
%K 牺牲层技术
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=5F798037852689B2B779EA3C8AAF91C8&yid=67289AFF6305E306&vid=771469D9D58C34FF&iid=0B39A22176CE99FB&sid=EA64BD0B2FF6E786&eid=26AEEED215BE97D0&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=10