%0 Journal Article
%T A multivariate process capability index with a spatial coefficient<br>基于空间域系数的多变量工序能力指数
%A Wang Shaoxi
%A Wang Mingxin
%A Fan Xiaoy
%A Zhang Shengbing
%A Han Ru
%A <br>王少熙
%A 王明辛
%A 樊晓桠
%A 张盛兵
%A 韩茹
%J 半导体学报
%D 2013
%I 
%X After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.
%K process
%K process capability index
%K multivariate
%K off-center<br>工艺，工序能力指数，多变量，偏离
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4D6BB6A422263A45C2D909CD1FD6DC75&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=0B39A22176CE99FB&sid=9D150821EF1D4A0E&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=13