%0 Journal Article
%T Cu doped AlSb polycrystalline thin films<br>Cu掺杂AlSb多晶薄膜的研究
%A Wu Lili
%A Jin Shuo
%A Zeng Guanggen
%A Zhang Jingquan
%A Li Wei
%A Feng Lianghuan
%A Li Bing
%A Wang Wenwu
%A <br>Wu Lili
%A Jin Shuo
%A Zeng Guanggen
%A Zhang Jingquan
%A Li Wei
%A Feng Lianghuan
%A Li Bing
%A Wang Wenwu
%J 半导体学报
%D 2013
%I 
%X Cu-doped AlSb polycrystalline films were grown on quartz glass by magnetron co-sputtering. The structural, morphological and electrical properties of the films were studied. The incorporation of copper atoms can result in the increase of lattice constants, and annealing is helpful to eliminate this deformation. Cu-doped AlSb films exhibit weak n-type conductivity. The results show that the doping effect has a close relationship with the annealing process, meaning that the position of Cu atom in AlSb polycrystalline films might influence the doping effect.
%K dope
%K AlSb film
%K conductivity activation energy<br>掺杂
%K AlSb薄膜
%K 电导激活能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4D6BB6A422263A45AF59783C2783CF66&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=CA4FD0336C81A37A&sid=7504EF6BBE2E9A4C&eid=38B194292C032A66&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=12