%0 Journal Article
%T Influence of growth time on crystalline structure, conductivity and optical properties of ZnO thin films<br>Influence of Growth Time on Crystalline Structure, Conductivity and Optical Properties of ZnO Thin FilmsSaid Benramache a, Foued Chabane a, Boubaker Benhaoua b, Fatima Z. Lemmadia
%A Said Benramache
%A Foued Chabane
%A Boubaker Benhaoua
%A Fatima Z Lemmadi
%A <br>Said Benramache
%A Foued Chabane
%A Boubaker Benhaou
%A Fatima Z. Lemmadi
%J 半导体学报
%D 2013
%I 
%X This paper examines the growth of ZnO thin films on glass substrate at 350 ℃ using an ultrasonic spray technique. We have investigated the influence of growth time ranging from 1 to 4 min on structural, optical and electrical properties of ZnO thin films. The as-grown films exhibit a hexagonal structure wurtzite and are (002) oriented. The maximum value of grain size G = 63.99 nm is attained for ZnO films grown at 2 min. The average transmittance is about 80%, thus the films are transparent in the visible region. The optical gap energy is found to increase from 3.26 to 3.37 eV with growth time increased from 1 to 2 min. The minimum value of electrical resistivity of the films is 0.13 Ω·cm obtained at 2 min. A systematic study on the influence of growth time on the properties of ZnO thin films deposited by ultrasonic spray at 350 ℃ has been reported.
%K ZnO
%K thin film
%K growth time
%K ultrasonic spray technique<br>
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=4D6BB6A422263A4594577C5B414C2ACA&yid=FF7AA908D58E97FA&vid=339D79302DF62549&iid=0B39A22176CE99FB&sid=96FBA1D95866AB68&eid=E158A972A605785F&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=19